2026-2032 Global DUV Lasers Industry Research & Trends Analysis Report- YH Research

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2026-2032 Global DUV Lasers Industry Research & Trends Analysis Report

Publication Date: 2026-01-02
Report Id: 2871839
Industry: Machinery & Equipment
Report Page: 122
Chart: 127

PDF Download

Publication Date: 2026-01-02
Report Id: 2871839
Industry: Machinery & Equipment
Report Page: 122
Chart: 127

PDF Download

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Table of Contents
Description
Table of Figures
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1 Market Overview
1.1 DUV Lasers Definition
1.2 Global DUV Lasers Market Size and Forecast
1.2.1 By Revenue, Global DUV Lasers Market Size, 2021-2032
1.2.2 By Sales Volume, Global DUV Lasers Market Size, 2021-2032
1.2.3 Global DUV Lasers Price Trend, 2021-2032
1.3 China DUV Lasers Market Size and Forecast
1.3.1 By Revenue, China DUV Lasers Market Size, 2021-2032
1.3.2 By Sales Volume, China DUV Lasers Market Size, 2021-2032
1.3.3 China DUV Lasers Price Trend, 2021-2032
1.4 China Percentage in Global Market
1.4.1 By Revenue, China DUV Lasers Share in Global Market, 2021-2032
1.4.2 By Sales Volume, China DUV Lasers Share in Global Market, 2021-2032
1.4.3 DUV Lasers Market Size: China VS Global, 2021-2032
1.5 DUV Lasers Market Dynamics
1.5.1 DUV Lasers Market Drivers
1.5.2 DUV Lasers Market Restraints
1.5.3 DUV Lasers Industry Trends
1.5.4 DUV Lasers Industry Policy

2 Global Competitive Landscape by Company
2.1 Global DUV Lasers Revenue by Company, 2021-2026
2.2 Global DUV Lasers Sales Volume by Company, 2021-2026
2.3 Global DUV Lasers Price by Company, 2021-2026
2.4 Global DUV Lasers Participants, Market Position (Tier 1, Tier 2, and Tier 3)
2.5 Global DUV Lasers Concentration Ratio
2.6 Global DUV Lasers Mergers & Acquisitions, Expansion Plans
2.7 Global DUV Lasers Manufacturers Product Type

3 China Competitive Landscape by Company
3.1 China DUV Lasers Revenue by Company, 2021-2026
3.2 China DUV Lasers Sales Volume by Company, 2021-2026
3.3 China DUV Lasers DUV Lasers Participants, Market Position (Tier 1, Tier 2, and Tier 3)
3.4 China DUV Lasers Market, Sales Percentage of Local Players VS Foreign Players (2021-2026)
3.5 Chinese Local Players, DUV Lasers Domestic VS Export
3.6 China Market, DUV Lasers Import & Export
3.6.1 China Market, DUV Lasers Import & Export, 2021-2032
3.6.2 China DUV Lasers Import & Export Trends
3.6.3 Main Sources of China DUV Lasers Import
3.6.4 Export Destination of China DUV Lasers

4 DUV Lasers Production by Region
4.1 Global DUV Lasers Capacity, Production and Capacity Utilization, 2021-2032
4.2 Global Geographic Distribution of DUV Lasers Manufacturers
4.3 Global Major Manufacturers, DUV Lasers Capacity Expansion and Future Plans
4.4 Global DUV Lasers Capacity by Region
4.5 Global DUV Lasers Production by Region
4.5.1 Global DUV Lasers Production & Forecast by Region, 2021 VS 2025 VS 2032
4.5.2 Global DUV Lasers Production by Region, 2021-2026
4.5.3 Global DUV Lasers Production Market Share & Forecast by Region, 2021-2032

5 Industry Chain Analysis
5.1 DUV Lasers Industry Chain
5.2 DUV Lasers Upstream Analysis
5.2.1 DUV Lasers Core Raw Materials
5.2.2 Main Manufacturers of DUV Lasers Core Raw Materials
5.3 Midstream Analysis
5.4 Downstream Analysis
5.5 DUV Lasers Production Mode
5.6 DUV Lasers Procurement Model
5.7 DUV Lasers Industry Sales Model and Sales Channels
5.7.1 DUV Lasers Sales Model
5.7.2 DUV Lasers Typical Distributors

6 Sights by Type
6.1 DUV Lasers Classification by Type
6.1.1 CW Laser
6.1.2 Pulse Laser
6.2 by Type, Global DUV Lasers Market Size & CAGR, 2021 VS 2025 VS 2032
6.3 by Type, Global DUV Lasers Revenue, 2021-2032
6.4 by Type, Global DUV Lasers Sales Volume, 2021-2032
6.5 by Type, Global DUV Lasers Price, 2021-2032

7 Sights by Power
7.1 DUV Lasers Classification by Power
7.1.1 Below 50mW
7.1.2 50mW-300mW
7.1.3 Above 300mW
7.2 by Power, Global DUV Lasers Market Size & CAGR, 2021 VS 2025 VS 2032
7.3 by Power, Global DUV Lasers Revenue, 2021-2032
7.4 by Power, Global DUV Lasers Sales Volume, 2021-2032
7.5 by Power, Global DUV Lasers Price, 2021-2032

8 Sights by Laser Architecture
8.1 DUV Lasers Classification by Laser Architecture
8.1.1 ArF/KrF/F₂
8.1.2 DPSS/Nd:YAG, etc.
8.2 by Laser Architecture, Global DUV Lasers Market Size & CAGR, 2021 VS 2025 VS 2032
8.3 by Laser Architecture, Global DUV Lasers Revenue, 2021-2032
8.4 by Laser Architecture, Global DUV Lasers Sales Volume, 2021-2032
8.5 by Laser Architecture, Global DUV Lasers Price, 2021-2032

9 Sights by Application
9.1 DUV Lasers Segment by Application
9.1.1 Semiconductor
9.1.2 Research and Development
9.1.3 Others
9.2 by Application, Global DUV Lasers Market Size & CAGR, 2021 VS 2025 VS 2032
9.3 by Application, Global DUV Lasers Revenue, 2021-2032
9.4 by Application, Global DUV Lasers Sales Volume, 2021-2032
9.5 by Application, Global DUV Lasers Price, 2021-2032

10 Sales Sights by Region
10.1 By Region, Global DUV Lasers Market Size, 2021 VS 2025 VS 2032
10.2 By Region, Global DUV Lasers Revenue, 2021-2032
10.3 By Region, Global DUV Lasers Sales Volume, 2021-2032
10.4 North America
10.4.1 North America DUV Lasers Market Size & Forecasts, 2021-2032
10.4.2 By Country, North America DUV Lasers Market Size Market Share
10.5 Europe
10.5.1 Europe DUV Lasers Market Size & Forecasts, 2021-2032
10.5.2 By Country, Europe DUV Lasers Market Size Market Share
10.6 Asia Pacific
10.6.1 Asia Pacific DUV Lasers Market Size & Forecasts, 2021-2032
10.6.2 By Country/Region, Asia Pacific DUV Lasers Market Size Market Share
10.7 South America
10.7.1 South AmericaDUV Lasers Market Size & Forecasts, 2021-2032
10.7.2 By Country, South America DUV Lasers Market Size Market Share
10.8 Middle East & Africa

11 Sales Sights by Country Level
11.1 By Country, Global DUV Lasers Market Size & CAGR，2021 VS 2025 VS 2032
11.2 By Country, Global DUV Lasers Revenue, 2021-2032
11.3 By Country, Global DUV Lasers Sales Volume, 2021-2032
11.4 United States
11.4.1 United States DUV Lasers Market Size, 2021-2032
11.4.2 By Company, United States DUV Lasers Sales Volume Market Share, 2025
11.4.3 by Type, United States DUV Lasers Market Size, Share, 2025 VS 2032
11.4.4 by Application, United States DUV Lasers Market Size, Share, 2025 VS 2032
11.5 Europe
11.5.1 Europe DUV Lasers Market Size, 2021-2032
11.5.2 By Company, Europe DUV Lasers Sales Volume Market Share, 2025
11.5.3 by Type, Europe DUV Lasers Market Size, Share, 2025 VS 2032
11.5.4 by Application, Europe DUV Lasers Market Size, Share, 2025 VS 2032
11.6 China
11.6.1 China DUV Lasers Market Size, 2021-2032
11.6.2 By Company, China DUV Lasers Sales Volume Market Share, 2025
11.6.3 by Type, China DUV Lasers Market Size, Share, 2025 VS 2032
11.6.4 by Application, China DUV Lasers Market Size, Share, 2025 VS 2032
11.7 Japan
11.7.1 Japan DUV Lasers Market Size, 2021-2032
11.7.2 By Company, Japan DUV Lasers Market Share, 2025
11.7.3 by Type, Japan DUV Lasers Market Size, Share, 2025 VS 2032
11.7.4 by Application, Japan DUV Lasers Market Size, Share, 2025 VS 2032
11.8 South Korea
11.8.1 South Korea DUV Lasers Market Size, 2021-2032
11.8.2 By Company, South Korea DUV Lasers Market Share, 2025
11.8.3 by Type, South Korea DUV Lasers Market Size, Share, 2025 VS 2032
11.8.4 by Application, South Korea DUV Lasers Market Size, Share, 2025 VS 2032
11.9 Southeast Asia
11.9.1 Southeast Asia DUV Lasers Market Size, 2021-2032
11.9.2 By Company, Southeast Asia DUV Lasers Market Share, 2025
11.9.3 by Type, Southeast Asia DUV Lasers Market Size, Share, 2025 VS 2032
11.9.4 by Application, Southeast Asia DUV Lasers Market Size, Share, 2025 VS 2032
11.10 India
11.10.1 India DUV Lasers Market Size, 2021-2032
11.10.2 By Company, India DUV Lasers Market Share, 2025
11.10.3 by Type, India DUV Lasers Market Size, Share, 2025 VS 2032
11.10.4 by Application, India DUV Lasers Market Size, Share, 2025 VS 2032
11.11 Middle East & Africa
11.11.1 Middle East & Africa DUV Lasers Market Size, 2021-2032
11.11.2 By Company, Middle East & Africa DUV Lasers Market Share, 2025
11.11.3 by Type, Middle East & Africa DUV Lasers Market Size, Share, 2025 VS 2032
11.11.4 by Application, Middle East & Africa DUV Lasers Market Size, Share, 2025 VS 2032

12 Manufacturers Profile
12.1 Cymer (ASML)
12.1.1 Cymer (ASML) Company Information, Head Office, Market Area, and Industry Position
12.1.2 Cymer (ASML) DUV Lasers Models, Specifications, and Application
12.1.3 Cymer (ASML) DUV Lasers Sales Volume, Revenue, Price and Gross Margin, 2021-2026
12.1.4 Cymer (ASML) Company Profile and Main Business
12.1.5 Cymer (ASML) Recent Developments
12.2 Gigaphoton
12.2.1 Gigaphoton Company Information, Head Office, Market Area, and Industry Position
12.2.2 Gigaphoton DUV Lasers Models, Specifications, and Application
12.2.3 Gigaphoton DUV Lasers Sales Volume, Revenue, Price and Gross Margin, 2021-2026
12.2.4 Gigaphoton Company Profile and Main Business
12.2.5 Gigaphoton Recent Developments
12.3 Coherent
12.3.1 Coherent Company Information, Head Office, Market Area, and Industry Position
12.3.2 Coherent DUV Lasers Models, Specifications, and Application
12.3.3 Coherent DUV Lasers Sales Volume, Revenue, Price and Gross Margin, 2021-2026
12.3.4 Coherent Company Profile and Main Business
12.3.5 Coherent Recent Developments
12.4 OXIDE Corporation
12.4.1 OXIDE Corporation Company Information, Head Office, Market Area, and Industry Position
12.4.2 OXIDE Corporation DUV Lasers Models, Specifications, and Application
12.4.3 OXIDE Corporation DUV Lasers Sales Volume, Revenue, Price and Gross Margin, 2021-2026
12.4.4 OXIDE Corporation Company Profile and Main Business
12.4.5 OXIDE Corporation Recent Developments
12.5 CryLas
12.5.1 CryLas Company Information, Head Office, Market Area, and Industry Position
12.5.2 CryLas DUV Lasers Models, Specifications, and Application
12.5.3 CryLas DUV Lasers Sales Volume, Revenue, Price and Gross Margin, 2021-2026
12.5.4 CryLas Company Profile and Main Business
12.5.5 CryLas Recent Developments
12.6 Nireco
12.6.1 Nireco Company Information, Head Office, Market Area, and Industry Position
12.6.2 Nireco DUV Lasers Models, Specifications, and Application
12.6.3 Nireco DUV Lasers Sales Volume, Revenue, Price and Gross Margin, 2021-2026
12.6.4 Nireco Company Profile and Main Business
12.6.5 Nireco Recent Developments
12.7 Advanced Optowave Corporation
12.7.1 Advanced Optowave Corporation Company Information, Head Office, Market Area, and Industry Position
12.7.2 Advanced Optowave Corporation DUV Lasers Models, Specifications, and Application
12.7.3 Advanced Optowave Corporation DUV Lasers Sales Volume, Revenue, Price and Gross Margin, 2021-2026
12.7.4 Advanced Optowave Corporation Company Profile and Main Business
12.7.5 Advanced Optowave Corporation Recent Developments
12.8 Xiton Photonics
12.8.1 Xiton Photonics Company Information, Head Office, Market Area, and Industry Position
12.8.2 Xiton Photonics DUV Lasers Models, Specifications, and Application
12.8.3 Xiton Photonics DUV Lasers Sales Volume, Revenue, Price and Gross Margin, 2021-2026
12.8.4 Xiton Photonics Company Profile and Main Business
12.8.5 Xiton Photonics Recent Developments
12.9 UVC Photonics
12.9.1 UVC Photonics Company Information, Head Office, Market Area, and Industry Position
12.9.2 UVC Photonics DUV Lasers Models, Specifications, and Application
12.9.3 UVC Photonics DUV Lasers Sales Volume, Revenue, Price and Gross Margin, 2021-2026
12.9.4 UVC Photonics Company Profile and Main Business
12.9.5 UVC Photonics Recent Developments
12.10 IPG Photonics
12.10.1 IPG Photonics Company Information, Head Office, Market Area, and Industry Position
12.10.2 IPG Photonics DUV Lasers Models, Specifications, and Application
12.10.3 IPG Photonics DUV Lasers Sales Volume, Revenue, Price and Gross Margin, 2021-2026
12.10.4 IPG Photonics Company Profile and Main Business
12.10.5 IPG Photonics Recent Developments

13 Conclusion

14 Appendix
14.1 Research Methodology
14.2 Data Source
14.2.1 Secondary Sources
14.2.2 Primary Sources
14.3 Market Estimation Model
14.4 Disclaimer

According to YH Research, the global market for DUV Lasers should grow from US$ 1063 million in 2025 to US$ 1833 million by 2032, with a CAGR of 8.5% for the period of 2026-2032.

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DUV Lasers

According to YH Research, the global market for DUV Lasers should grow from US$ 1063 million in 2025 to US$ 1833 million by 2032, with a CAGR of 8.5% for the period of 2026-2032.

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In-depth insight into market trends

A deep ultraviolet (deep UV, DUV) laser is a type of laser that emits light in the deep ultraviolet region of the electromagnetic spectrum, which typically ranges from around 100 nanometers (nm) to 300 nm in wavelength. This region of the spectrum is often referred to as "deep UV" because it encompasses shorter wavelengths than those found in the visible and near-ultraviolet regions. Deep UV Lasers have a variety of scientific, industrial, and technological applications.

In 2025, global DUV lasers production reached approximately 2,516 units, with an average global market price of around US$ 397.4 K per unit.

In the upstream supply chain of DUV lasers, nonlinear optical crystals and voice coil motors (VCMs) are two representative component categories that directly support wavelength conversion, beam conditioning, and precision motion/control functions in DUV laser subsystems. For nonlinear optical crystals—used in frequency conversion and harmonic generation—representative suppliers include Eksma Optics, Hangzhou Shalom EO, CASTECH, Kogakugiken Corp, Coherent, and OXIDE. For voice coil motors—commonly adopted in fine positioning, fast steering, focusing, and high-response opto-mechatronic modules within laser and optics assemblies—representative suppliers include OXIDE, Geeplus, Thorlabs, and Moticont. Together, these suppliers illustrate the specialized and precision-oriented upstream ecosystem that supports DUV laser performance in stability, accuracy, and system integration.

Downstream applications are typically grouped into Semiconductor, Research and Development, and Other applications. In semiconductors, DUV lasers are used as core light sources for DUV lithography-related systems (notably excimer-based light sources) and also in inspection/metrology, reticle/wafer processing, and certain micromachining steps where deep-UV interaction is advantageous. Typical customer ecosystems include lithography and light-source value chains and major semiconductor manufacturers, such as ASML (Cymer), Gigaphoton, Nikon, Canon, and leading fabs/IDMs including TSMC, Samsung Electronics, Intel, SK hynix, and Micron. In R&D, customers include national laboratories, universities, and research institutes (and their instrument integrators) using DUV in spectroscopy, photochemistry, and advanced materials research. Other applications commonly flow through laser system integrators into precision micromachining, electronics manufacturing, and specialty industrial processes.

In terms of gross margin, DUV lasers are generally high-value and high-complexity products, gross margins for DUV-laser businesses are commonly around 30%–60%.

Deep ultraviolet (DUV) lasers are laser sources that emit in the deep-UV band and are widely adopted in precision processes where short-wavelength photons enable higher resolution, stronger material absorption, and tighter process windows than visible or near-UV solutions. In commercial practice, DUV lasers are deployed both as stand-alone light sources and as embedded subsystems inside advanced tools, with performance requirements typically defined by wavelength stability, dose/energy stability, uptime, and contamination control. The market is structurally shaped by two core product forms—continuous-wave (CW) lasers and pulsed lasers—each aligned to distinct operating needs and integration architectures, while sharing the common value proposition of enabling high-precision, high-yield manufacturing and high-sensitivity scientific experimentation.

From a product-type perspective, the DUV laser market is dominated by pulsed platforms. In 2025, Pulse Laser products accounted for approximately 91% of the global market, reflecting the prevalence of pulsed operation in semiconductor exposure light sources, inspection and metrology workflows, and high-peak-power industrial and laboratory processes that benefit from time-gated energy delivery. CW Laser products represent the remaining share and are typically selected where continuous irradiation, steady-state power delivery, or simplified temporal control is prioritized. The dominance of pulsed systems also reflects their scalability into higher energy and repetition-rate regimes and their strong fit with mature excimer and frequency-converted architectures that have become deeply embedded in semiconductor tool ecosystems.

From an application perspective, Semiconductor is the clear demand center for DUV lasers. In 2025, Semiconductor applications represented approximately 76% of global market share, underpinned by DUV lithography-related light sources and a broader set of semiconductor manufacturing steps that rely on deep-UV interaction for precision and throughput. Research and Development forms the secondary pillar, encompassing universities, national laboratories, and corporate R&D teams using DUV lasers in spectroscopy, photochemistry, advanced materials, and life-science instrumentation. Other Applications comprise a smaller but diverse tail of industrial uses, including specialized micromachining and niche optical processes. Geographically, Asia-Pacific is the largest consumption region, representing about 45% of global revenue in 2025, consistent with the region’s concentration of semiconductor manufacturing capacity, electronics supply chains, and expanding applied research infrastructure.

Market growth is primarily driven by the continuing scaling and complexity of semiconductor manufacturing, where DUV lasers remain critical across multiple nodes of the process flow and where tool performance requirements increasingly favor high-stability, high-uptime light sources. The push for higher productivity and yield in advanced fabs, combined with ongoing capacity additions and technology upgrades in Asia-Pacific, strengthens replacement and expansion demand for DUV laser subsystems. In parallel, rising investment in research infrastructure and the acceleration of deep-UV-enabled analytical techniques support incremental demand outside pure semiconductor manufacturing. Additional momentum comes from end users’ preference for proven, production-qualified platforms with well-established service ecosystems, which tends to reinforce demand for incumbent DUV laser architectures in high-stakes manufacturing environments.

At the same time, the DUV laser market faces meaningful restraints. The supply chain is specialized and sensitive, with critical dependencies on UV-grade optics, coatings, high-purity gases and gas-handling subsystems (for excimer-based solutions), and precision manufacturing under tight contamination controls, which can constrain capacity, elevate costs, and extend lead times. Customer qualification cycles are long—particularly in semiconductor tool chains—making demand more lumpy and less responsive to short-term price competition. The market is also exposed to semiconductor capital expenditure cycles and geopolitical or regulatory frictions that can affect tool deliveries, cross-border service, and component sourcing. Finally, high operating and maintenance requirements for certain DUV platforms, along with customers’ continuous focus on total cost of ownership, can slow adoption in non-core applications and place pressure on suppliers to deliver reliability improvements without proportionate price increases.

This report aims to provide a comprehensive study of the global market for DUV Lasers. Report Highlights:
(1) Global DUV Lasers market size (sales volume & revenue), history data from 2021-2025, and forecast data from 2026 to 2032.

(2) Global DUV Lasers market competitive situation, sales, revenue, price, and market share, from 2021 to 2026.

(3) China DUV Lasers market competitive situation, sales, revenue, price, and market share, from 2021 to 2026.

(4) Global DUV Lasers segment by region (or country), key regions cover the United States, Europe, China, Japan, South Korea, Southeast Asia, and India, etc.

(5) Global DUV Lasers segment by Type, and by Application, and regional segment by Type, and by Application.

(6) Global major production regions of DUV Lasers, capacity, production and trends.

(7) DUV Lasers industry supply chain, upstream, midstream, and downstream analysis.

Market segment by regions, regional analysis covers
North America (United States, Canada, and Mexico)
Europe (Germany, France, UK, Russia, Italy, and Rest of Europe)
Asia-Pacific (China, Japan, South Korea, India, Southeast Asia, Australia, and Rest of Asia-Pacific)
South America (Brazil, Rest of South America)
Middle East & Africa
Market segment by Type, covers
    CW Laser
    Pulse Laser

Market segment by Power, covers
    Below 50mW
    50mW-300mW
    Above 300mW

Market segment by Laser Architecture, covers
    ArF/KrF/F₂
    DPSS/Nd:YAG, etc.

Market segment by Application, can be divided into
    Semiconductor
    Research and Development
    Others

Market segment by players, this report covers
    Cymer (ASML)
    Gigaphoton
    Coherent
    OXIDE Corporation
    CryLas
    Nireco
    Advanced Optowave Corporation
    Xiton Photonics
    UVC Photonics
    IPG Photonics