Remote Plasma Sources - Global Top Players Market Share and Ranking 2026- YH Research

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Remote Plasma Sources - Global Top Players Market Share and Ranking 2026

Publication Date: 2026-01-05
Report Id: 2835623
Industry: Electronics & Semiconductor
Report Page: 111
Chart: 118

PDF Download

Publication Date: 2026-01-05
Report Id: 2835623
Industry: Electronics & Semiconductor
Report Page: 111
Chart: 118

PDF Download

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Table of Contents
Description
Table of Figures
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1 Market Overview
1.1 Remote Plasma Sources Definition
1.2 Global Remote Plasma Sources Market Size and Forecast
1.2.1 By Consumption Value, Global Remote Plasma Sources Market Size, 2021-2032
1.2.2 By Sales Quantity, Global Remote Plasma Sources Market Size, 2021-2032
1.2.3 Global Remote Plasma Sources Average Selling Price (ASP), 2021-2032
1.3 Japan Remote Plasma Sources Market Size and Forecast
1.3.1 By Consumption Value, Japan Remote Plasma Sources Market Size, 2021-2032
1.3.2 By Sales Quantity, Japan Remote Plasma Sources Market Size, 2021-2032
1.3.3 Japan Remote Plasma Sources Average Selling Price (ASP), 2021-2032
1.4 Share of Japan Remote Plasma Sources Market with Respect to the Global Market
1.4.1 By Consumption Value, Japan Remote Plasma Sources Market Share in Global, 2021-2032
1.4.2 By Sales Quantity, Japan Remote Plasma Sources Market Share in Global, 2021-2032
1.4.3 Remote Plasma Sources Market Size: Japan VS Global, 2021-2032
1.5 Remote Plasma Sources Market Dynamics
1.5.1 Remote Plasma Sources Market Drivers
1.5.2 Remote Plasma Sources Market Restraints
1.5.3 Remote Plasma Sources Industry Trends
1.5.4 Remote Plasma Sources Industry Policy

2 Global Leading Manufacturers and Market Share
2.1 By Revenue of Remote Plasma Sources, Global Market Share by Company, 2021-2026
2.2 By Sales Quantity of Remote Plasma Sources, Global Market Share by Company, 2021-2026
2.3 Remote Plasma Sources Average Selling Price (ASP) by Company, 2021-2026
2.4 Global Remote Plasma Sources Participants, Market Position (Tier 1, Tier 2, and Tier 3)
2.5 Global Remote Plasma Sources Concentration Ratio
2.6 Global Remote Plasma Sources Mergers & Acquisitions, Expansion Plans
2.7 Global Remote Plasma Sources Manufacturers Product Type
2.8 Head Office and Remote Plasma Sources Production Site of Key Manufacturer
2.9 Remote Plasma Sources Capacity of Major Manufacturers and Future Plan

3 Japan Leading Manufacturers and Market Share
3.1 By Revenue of Remote Plasma Sources, Japan Market Share by Company, 2021-2026
3.2 By Sales Quantity of Remote Plasma Sources, Japan Market Share by Company, 2021-2026
3.3 Japan Remote Plasma Sources Remote Plasma Sources Participants, Market Position (Tier 1, Tier 2, and Tier 3)

4 Global Producing Regions
4.1 Global Remote Plasma Sources Capacity, Output and Capacity Utilization, 2021-2032
4.2 Global Remote Plasma Sources Capacity by Region
4.3 Global Remote Plasma Sources Production & Forecast by Region, 2021 VS 2025 VS 2032
4.4 Global Remote Plasma Sources Production by Region, 2021-2032
4.5 Global Remote Plasma Sources Production Market Share & Forecast by Region, 2021-2032

5 Industry Chain Analysis
5.1 Remote Plasma Sources Industry Chain
5.2 Remote Plasma Sources Upstream Analysis
5.2.1 Remote Plasma Sources Core Raw Materials
5.2.2 Main Manufacturers of Remote Plasma Sources Core Raw Materials
5.3 Midstream Analysis
5.4 Downstream Analysis
5.5 Remote Plasma Sources Production Mode
5.6 Remote Plasma Sources Procurement Model
5.7 Remote Plasma Sources Industry Sales Model and Sales Channels
5.7.1 Remote Plasma Sources Sales Model
5.7.2 Remote Plasma Sources Typical Distributors

6 Sights Remote Plasma Sources Market Classification
6.1 Remote Plasma Sources Classification by Type
6.1.1 Remote Plasma Cleaner
6.1.2 Remote Plasma Processor
6.1.3 by Type, Global Remote Plasma Sources Consumption Value, 2021-2032
6.1.4 by Type, Global Remote Plasma Sources Sales Quantity, 2021-2032
6.1.5 by Type, Global Remote Plasma Sources Average Selling Price (ASP), 2021-2032
6.2 Remote Plasma Sources Classification by Incentive Method
6.2.1 Radio Frequency Remote Plasma Source
6.2.2 Microwave Remote Plasma Source
6.2.3 Others
6.2.4 by Incentive Method, Global Remote Plasma Sources Consumption Value, 2021-2032
6.2.5 by Incentive Method, Global Remote Plasma Sources Sales Quantity, 2021-2032
6.2.6 by Incentive Method, Global Remote Plasma Sources Average Selling Price (ASP), 2021-2032
6.3 Remote Plasma Sources Classification by Structural Form
6.3.1 Tubular RPS
6.3.2 Planar RPS
6.3.3 Jet RPS
6.3.4 by Structural Form, Global Remote Plasma Sources Consumption Value, 2021-2032
6.3.5 by Structural Form, Global Remote Plasma Sources Sales Quantity, 2021-2032
6.3.6 by Structural Form, Global Remote Plasma Sources Average Selling Price (ASP), 2021-2032

7 Sights by Application
7.1 Remote Plasma Sources Segment by Application
7.1.1 CVD
7.1.2 ALD/LPCVD
7.1.3 ETCH
7.1.4 Others
7.2 by Application, Global Remote Plasma Sources Consumption Value & CAGR, 2021 VS 2025 VS 2032
7.3 by Application, Global Remote Plasma Sources Consumption Value, 2021-2032
7.4 by Application, Global Remote Plasma Sources Sales Quantity, 2021-2032
7.5 by Application, Global Remote Plasma Sources Price, 2021-2032

8 Sales Sights by Region
8.1 By Region, Global Remote Plasma Sources Consumption Value, 2021 VS 2025 VS 2032
8.2 By Region, Global Remote Plasma Sources Consumption Value, 2021-2032
8.3 By Region, Global Remote Plasma Sources Sales Quantity, 2021-2032
8.4 North America
8.4.1 North America Remote Plasma Sources Market Size & Forecasts, 2021-2032
8.4.2 By Country, North America Remote Plasma Sources Market Size Market Share
8.5 Europe
8.5.1 Europe Remote Plasma Sources Market Size & Forecasts, 2021-2032
8.5.2 By Country, Europe Remote Plasma Sources Market Size Market Share
8.6 Asia Pacific
8.6.1 Asia Pacific Remote Plasma Sources Market Size & Forecasts, 2021-2032
8.6.2 By Country/Region, Asia Pacific Remote Plasma Sources Market Size Market Share
8.7 South America
8.7.1 South America Remote Plasma Sources Market Size & Forecasts, 2021-2032
8.7.2 By Country, South America Remote Plasma Sources Market Size Market Share
8.8 Middle East & Africa

9 Sales Sights by Country Level
9.1 By Country, Global Remote Plasma Sources Market Size & CAGR, 2021 VS 2025 VS 2032
9.2 By Country, Global Remote Plasma Sources Consumption Value, 2021-2032
9.3 By Country, Global Remote Plasma Sources Sales Quantity, 2021-2032
9.4 United States
9.4.1 United States Remote Plasma Sources Market Size, 2021-2032
9.4.2 by Type, United States Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.4.3 by Application, United States Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.5 Europe
9.5.1 Europe Remote Plasma Sources Market Size, 2021-2032
9.5.2 by Type, Europe Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.5.3 by Application, Europe Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.6 China
9.6.1 China Remote Plasma Sources Market Size, 2021-2032
9.6.2 by Type, China Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.6.3 by Application, China Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.7 Japan
9.7.1 Japan Remote Plasma Sources Market Size, 2021-2032
9.7.2 by Type, Japan Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.7.3 by Application, Japan Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.8 South Korea
9.8.1 South Korea Remote Plasma Sources Market Size, 2021-2032
9.8.2 by Type, South Korea Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.8.3 by Application, South Korea Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.9 Southeast Asia
9.9.1 Southeast Asia Remote Plasma Sources Market Size, 2021-2032
9.9.2 by Type, Southeast Asia Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.9.3 by Application, Southeast Asia Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.10 India
9.10.1 India Remote Plasma Sources Market Size, 2021-2032
9.10.2 by Type, India Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.10.3 by Application, India Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.11 Middle East & Africa
9.11.1 Middle East & Africa Remote Plasma Sources Market Size, 2021-2032
9.11.2 by Type, Middle East & Africa Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032
9.11.3 by Application, Middle East & Africa Remote Plasma Sources Sales Quantity Market Share, 2025 VS 2032

10 Manufacturers Profile
10.1 Advanced Energy
10.1.1 Advanced Energy Company Information, Head Office, Market Area, and Industry Position
10.1.2 Advanced Energy Remote Plasma Sources Models, Specifications, and Application
10.1.3 Advanced Energy Remote Plasma Sources Sales Quantity, Revenue, Price and Gross Margin, 2021-2026
10.1.4 Advanced Energy Company Profile and Main Business
10.1.5 Advanced Energy Recent Developments
10.2 New Power Plasma
10.2.1 New Power Plasma Company Information, Head Office, Market Area, and Industry Position
10.2.2 New Power Plasma Remote Plasma Sources Models, Specifications, and Application
10.2.3 New Power Plasma Remote Plasma Sources Sales Quantity, Revenue, Price and Gross Margin, 2021-2026
10.2.4 New Power Plasma Company Profile and Main Business
10.2.5 New Power Plasma Recent Developments
10.3 Samco-ucp
10.3.1 Samco-ucp Company Information, Head Office, Market Area, and Industry Position
10.3.2 Samco-ucp Remote Plasma Sources Models, Specifications, and Application
10.3.3 Samco-ucp Remote Plasma Sources Sales Quantity, Revenue, Price and Gross Margin, 2021-2026
10.3.4 Samco-ucp Company Profile and Main Business
10.3.5 Samco-ucp Recent Developments
10.4 MKS Instruments
10.4.1 MKS Instruments Company Information, Head Office, Market Area, and Industry Position
10.4.2 MKS Instruments Remote Plasma Sources Models, Specifications, and Application
10.4.3 MKS Instruments Remote Plasma Sources Sales Quantity, Revenue, Price and Gross Margin, 2021-2026
10.4.4 MKS Instruments Company Profile and Main Business
10.4.5 MKS Instruments Recent Developments
10.5 Muegge GmbH
10.5.1 Muegge GmbH Company Information, Head Office, Market Area, and Industry Position
10.5.2 Muegge GmbH Remote Plasma Sources Models, Specifications, and Application
10.5.3 Muegge GmbH Remote Plasma Sources Sales Quantity, Revenue, Price and Gross Margin, 2021-2026
10.5.4 Muegge GmbH Company Profile and Main Business
10.5.5 Muegge GmbH Recent Developments
10.6 PIE Scientific
10.6.1 PIE Scientific Company Information, Head Office, Market Area, and Industry Position
10.6.2 PIE Scientific Remote Plasma Sources Models, Specifications, and Application
10.6.3 PIE Scientific Remote Plasma Sources Sales Quantity, Revenue, Price and Gross Margin, 2021-2026
10.6.4 PIE Scientific Company Profile and Main Business
10.6.5 PIE Scientific Recent Developments
10.7 EN2CORE Technology
10.7.1 EN2CORE Technology Company Information, Head Office, Market Area, and Industry Position
10.7.2 EN2CORE Technology Remote Plasma Sources Models, Specifications, and Application
10.7.3 EN2CORE Technology Remote Plasma Sources Sales Quantity, Revenue, Price and Gross Margin, 2021-2026
10.7.4 EN2CORE Technology Company Profile and Main Business
10.7.5 EN2CORE Technology Recent Developments
10.8 Veeco
10.8.1 Veeco Company Information, Head Office, Market Area, and Industry Position
10.8.2 Veeco Remote Plasma Sources Models, Specifications, and Application
10.8.3 Veeco Remote Plasma Sources Sales Quantity, Revenue, Price and Gross Margin, 2021-2026
10.8.4 Veeco Company Profile and Main Business
10.8.5 Veeco Recent Developments
10.9 Shenzhou Semiconductor
10.9.1 Shenzhou Semiconductor Company Information, Head Office, Market Area, and Industry Position
10.9.2 Shenzhou Semiconductor Remote Plasma Sources Models, Specifications, and Application
10.9.3 Shenzhou Semiconductor Remote Plasma Sources Sales Quantity, Revenue, Price and Gross Margin, 2021-2026
10.9.4 Shenzhou Semiconductor Company Profile and Main Business
10.9.5 Shenzhou Semiconductor Recent Developments
10.10 CSL
10.10.1 CSL Company Information, Head Office, Market Area, and Industry Position
10.10.2 CSL Remote Plasma Sources Models, Specifications, and Application
10.10.3 CSL Remote Plasma Sources Sales Quantity, Revenue, Price and Gross Margin, 2021-2026
10.10.4 CSL Company Profile and Main Business
10.10.5 CSL Recent Developments
10.11 Shanghai Lizhao Technology
10.11.1 Shanghai Lizhao Technology Company Information, Head Office, Market Area, and Industry Position
10.11.2 Shanghai Lizhao Technology Remote Plasma Sources Models, Specifications, and Application
10.11.3 Shanghai Lizhao Technology Remote Plasma Sources Sales Quantity, Revenue, Price and Gross Margin, 2021-2026
10.11.4 Shanghai Lizhao Technology Company Profile and Main Business
10.11.5 Shanghai Lizhao Technology Recent Developments

11 Conclusion

12 Appendix
12.1 Research Methodology
12.2 Data Source
12.2.1 Secondary Sources
12.2.2 Primary Sources
12.3 Market Estimation Model
12.4 Disclaimer

According to YH Research, the global market for Remote Plasma Sources should grow from US$ 591 million in 2025 to US$ 2409 million by 2032, with a CAGR of 22.0% for the period of 2026-2032.

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Remote Plasma Sources

According to YH Research, the global market for Remote Plasma Sources should grow from US$ 591 million in 2025 to US$ 2409 million by 2032, with a CAGR of 22.0% for the period of 2026-2032.

Unit: US$ M

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In-depth insight into market trends

A remote plasma source (RPS) is a device used to generate plasma, typically for surface treatment, material modification, and thin film deposition in a vacuum environment. RPS generates plasma by delivering gas into the device, using an electric or magnetic field, and then transports the plasma to the surface area to be treated. Unlike traditional plasma sources, RPS typically does not directly contact the surface to be treated; instead, it generates plasma at a distance and delivers it to the target surface, hence the name "remote plasma source."
The main advantages of RPS are its ability to achieve uniform surface treatment, and for sensitive surfaces or materials, the distance from the plasma reduces thermal and chemical damage. Furthermore, RPS can be integrated into vacuum processing systems, making surface treatment and material modification processes more flexible and efficient.

In 2025, the global production of remote plasma sources will reach 15,768 units, with an average price of US$35,230 per unit and a gross profit margin of approximately 42%.

From an industry development perspective, remote plasma sources (RPS) are gradually evolving from "optional process components" into key fundamental modules in advanced processes. Against the backdrop of increasingly complex device structures and narrowing process windows, RPS, with its low plasma damage, high free radical controllability, and good process repeatability, is becoming increasingly irreplaceable in core processes such as ALD, cleaning, and surface modification. Although it still faces practical constraints in terms of cost, verification cycle, and application boundaries, with the increasing penetration of advanced processes, the expansion of semiconductor applications, and the advancement of equipment localization, the remote plasma source industry has a clear medium- to long-term growth logic. The focus of competition will gradually shift from "whether to adopt" to "performance stability and system-level synergy capabilities."
From a longer-term perspective, remote plasma sources are becoming an important guarantee of "process determinism" in semiconductor manufacturing, rather than just a single functional component. As advanced logic devices evolve towards GAA structures and memory evolves towards ultra-high-layer 3D NAND, the tolerance of wafer manufacturing for interface quality, defect density, and batch consistency is constantly decreasing, and the limitations of traditional intracavity plasmas in terms of ion bombardment and charge damage are becoming increasingly apparent. By decoupling plasma generation from wafer processing and introducing only chemically active free radicals, RPS significantly improves process window stability and yield repeatability in key steps such as ALD, in-situ cleaning, surface activation, and selective reactions. In the short term, it still faces practical constraints in terms of cost, verification cycle, and applicable process range, making it difficult to fully replace all plasma solutions. However, in the medium to long term, with the increasing penetration of advanced processes, the evolution of process modules towards atomic-level control, and the enhancement of equipment localization and system-level integration capabilities, the strategic value of remote plasma sources will continue to amplify, and industry competition will gradually shift from single-point performance comparisons to comprehensive competition based on reliability, lifespan management, and process synergy capabilities.

This report studies and analyses global Remote Plasma Sources status and future trends, helps the client to determine the Remote Plasma Sources market size of the total market opportunity by Type, by Application, by company, and by region & country. This report is a detailed and comprehensive analysis of the world market for Remote Plasma Sources, and provides market size (in Units & US$ million) and Year-over-Year growth, considering 2025 as the base year.

For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.

To assess the competitive environment within the market including supplier revenue, market share, and company profiles.

Highlights
(1) Global Remote Plasma Sources market size, history data 2021-2025, and forecast data 2026-2032, (US$ million) & (Units)
(2) Global Remote Plasma Sources sales, revenue, price by company, market share and industry ranking 2021-2026, (US$ million) & (Units)
(3) Japan Remote Plasma Sources sales, revenue, price by company, market share and industry ranking 2021-2026, (US$ million) & (Units)
(4) Global Remote Plasma Sources key consuming regions, consumption quantity, consumption value and demand structure
(5) Global Remote Plasma Sources key producing regions, capacity, production, and year over year growth
(6) Remote Plasma Sources industry chains, upstream, midstream and downstream
Market segment by players, this report covers
    Advanced Energy
    New Power Plasma
    Samco-ucp
    MKS Instruments
    Muegge GmbH
    PIE Scientific
    EN2CORE Technology
    Veeco
    Shenzhou Semiconductor
    CSL
    Shanghai Lizhao Technology

Market segment by Type, covers
    Remote Plasma Cleaner
    Remote Plasma Processor

Market segment by Incentive Method, covers
    Radio Frequency Remote Plasma Source
    Microwave Remote Plasma Source
    Others

Market segment by Structural Form, covers
    Tubular RPS
    Planar RPS
    Jet RPS

Market segment by Application, can be divided into
    CVD
    ALD/LPCVD
    ETCH
    Others

Market segment by regions, regional analysis covers
North America (United States, Canada, and Mexico)
Europe (Germany, France, UK, Russia, Italy, and Rest of Europe)
Asia-Pacific (China, Japan, South Korea, India, Southeast Asia, Australia, and Rest of Asia-Pacific)
South America (Brazil, Rest of South America)
Middle East & Africa
Report Includes:
Chapter 1: to describe Remote Plasma Sources product scope, global sales quantity, value and average price, Japan sales quantity, value and average price, development opportunities, challenges, trends, and policies
Chapter 2: Global Remote Plasma Sources market share and ranking of major manufacturers, sales quantity, revenue, average price, 2021-2026
Chapter 3: Japan Remote Plasma Sources market share and ranking of major manufacturers, sales quantity, revenue, average price, 2021-2026
Chapter 4: Global key producing regions of Remote Plasma Sources, percent & CAGR, 2021-2032
Chapter 5: Remote Plasma Sources industry chain, upstream, medium-stream, and downstream
Chapter 6: Segment by Type, sales quantity, average price, consumption value, percent & CAGR, 2021-2032
Chapter 7: Segment by Application, sales quantity, average price, consumption value, percent & CAGR, 2021-2032
Chapter 8: Segment in regional level, sales quantity, average price, consumption value, percent & CAGR, 2021-2032
Chapter 9: Segment in country level, sales quantity, average price, consumption value, percent & CAGR, 2021-2032
Chapter 10: Company profile, introducing the basic situation of the main companies in the market in detail, including product specifications, application, recent development, sales quantity, average price, revenue, gross margin
Chapter 11: Conclusions